Genesis of ZnO nanolayers grown by ALD in micro channel plates

Adil Yafyasov, Arseniy Drozd, Victor Drozd, Sergey Kesaev

Результат исследований: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференции

Выдержка

In this work we investigated the possibility of applying the method of Atomic Layer Deposition to obtain thin films of zinc oxide deposited in narrow channels of micro channel plate. Calculations were carried out to find the optimum conditions for the synthesis. The resulting films have good continuity and uniformity. The electrical conductivity was studied on zinc oxide in the initial stages of growth on structures which we prepared.

Язык оригиналаанглийский
Название основной публикации2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings
РедакторыNikolay V. Egorov, Konstantin A. Nikiforov, Victor E. Drozd
ИздательInstitute of Electrical and Electronics Engineers Inc.
Страницы31-32
Число страниц2
ISBN (электронное издание)9781509034161
DOI
СостояниеОпубликовано - 24 мар 2017
Событие14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - St. Petersburg, Российская Федерация
Продолжительность: 1 окт 20163 окт 2016

Серия публикаций

Название2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings

Конференция

Конференция14th International Baltic Conference on Atomic Layer Deposition, BALD 2016
СтранаРоссийская Федерация
ГородSt. Petersburg
Период1/10/163/10/16

Отпечаток

Zinc Oxide
microchannel plates
Zinc oxide
zinc oxides
Atomic layer deposition
atomic layer epitaxy
continuity
Thin films
electrical resistivity
synthesis
thin films
Electric Conductivity

Предметные области Scopus

  • Электроника, оптика и магнитные материалы
  • Поверхности, слои и пленки
  • Атомная и молекулярная физика и оптика
  • Поверхности и интерфейсы
  • Химия и технология процессов
  • Электрохимия

Цитировать

Yafyasov, A., Drozd, A., Drozd, V., & Kesaev, S. (2017). Genesis of ZnO nanolayers grown by ALD in micro channel plates. В N. V. Egorov, K. A. Nikiforov, & V. E. Drozd (Ред.), 2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings (стр. 31-32). [7886529] (2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/BALD.2016.7886529
Yafyasov, Adil ; Drozd, Arseniy ; Drozd, Victor ; Kesaev, Sergey. / Genesis of ZnO nanolayers grown by ALD in micro channel plates. 2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings. редактор / Nikolay V. Egorov ; Konstantin A. Nikiforov ; Victor E. Drozd. Institute of Electrical and Electronics Engineers Inc., 2017. стр. 31-32 (2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings).
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abstract = "In this work we investigated the possibility of applying the method of Atomic Layer Deposition to obtain thin films of zinc oxide deposited in narrow channels of micro channel plate. Calculations were carried out to find the optimum conditions for the synthesis. The resulting films have good continuity and uniformity. The electrical conductivity was studied on zinc oxide in the initial stages of growth on structures which we prepared.",
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Yafyasov, A, Drozd, A, Drozd, V & Kesaev, S 2017, Genesis of ZnO nanolayers grown by ALD in micro channel plates. в NV Egorov, KA Nikiforov & VE Drozd (ред.), 2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings., 7886529, 2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings, Institute of Electrical and Electronics Engineers Inc., стр. 31-32, St. Petersburg, Российская Федерация, 1/10/16. https://doi.org/10.1109/BALD.2016.7886529

Genesis of ZnO nanolayers grown by ALD in micro channel plates. / Yafyasov, Adil; Drozd, Arseniy; Drozd, Victor; Kesaev, Sergey.

2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings. ред. / Nikolay V. Egorov; Konstantin A. Nikiforov; Victor E. Drozd. Institute of Electrical and Electronics Engineers Inc., 2017. стр. 31-32 7886529 (2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings).

Результат исследований: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференции

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Yafyasov A, Drozd A, Drozd V, Kesaev S. Genesis of ZnO nanolayers grown by ALD in micro channel plates. В Egorov NV, Nikiforov KA, Drozd VE, редакторы, 2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. стр. 31-32. 7886529. (2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings). https://doi.org/10.1109/BALD.2016.7886529