Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation

Alexander Kukaev, Dmitry Lukyanov, Denis Mikhailenko, Daniil Safronov, Sergey Shevchenko , Vladimir Venediktov, Andrey Vlasov

Результат исследований: Научные публикации в периодических изданияхстатья

Аннотация

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed
Язык оригиналаанглийский
Число страниц10
ЖурналMicromachines
Том12
Номер выпуска1
СостояниеОпубликовано - 2021

Предметные области Scopus

  • Физика и астрономия (все)

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