The effect of the spatial structure of an interface in multilayer metallic films on the spectrum of x-ray specular scattering is studied. Two types of interface structural defects are considered. One type is steps resulting in a variable layer thickness, and the other is the mixing of unlike metal atoms during epitaxial growth. These defects are shown to have different effects on the specular-scattering spectra. The mixing significantly decreases the Bragg-peak height, especially the height of higher order peaks. The interface roughness results in broadening of the Bragg peaks and in the disappearance of intermediate peaks between them.
Предметные области Scopus
- Электроника, оптика и магнитные материалы
- Физика конденсатов