Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow

Yu V. Fedoseeva, G. A. Pozdnyakov, A. V. Okotrub, M. A. Kanygin, Yu V. Nastaushev, O. Y. Vilkov, L. G. Bulusheva

Результат исследований: Научные публикации в периодических изданияхстатья

31 Цитирования (Scopus)

Выдержка

Since amorphous oxygenated hydrocarbon (COxHy) films are promising engineering materials a study of the structure and composition of the films depending on the conditions of synthesis is important for controlling of their physicochemical properties. Here, we used the methods of scanning and transmission electron microscopy, X-ray photoelectron, near-edge X-ray absorption fine structure, Fourier transform infrared and Raman spectroscopy to reveal changes in the chemical connectivity of COxHy films grown on silicon substrates heated to 300, 500, and 700 °C using a supersonic flow of methane plasma. It was found that the COxHy films, deposited at 300 and 500 °C, were mainly composed of the sp2-hybridized carbon areas with various oxygen species. A rise of the substrate temperature caused an increase of the portion of tetrahedral carbon atoms as well as carboxyl and hydroxyl groups. With growth of the substrate temperature, the film thickness reduced monotonically from 400 to 180 nm, while the film adhesion improved substantially. The films, deposited at lower temperatures, showed high hydrophilicity due to porosity and presence of oxygenated groups both at the surface and in the bulk.

Язык оригиналаанглийский
Страницы (с-по)464-471
Число страниц8
ЖурналApplied Surface Science
Том385
DOI
СостояниеОпубликовано - 2016

Отпечаток

Plasma flow
Methane
Hydrocarbons
Substrates
Temperature
Carbon
Supersonic flow
X ray absorption
Hydrophilicity
Silicon
Photoelectrons
Hydroxyl Radical
Fourier transform infrared spectroscopy
Film thickness
Raman spectroscopy
Adhesion
Porosity
Oxygen
Transmission electron microscopy
Plasmas

Предметные области Scopus

  • Поверхности, слои и пленки

Цитировать

Fedoseeva, Y. V., Pozdnyakov, G. A., Okotrub, A. V., Kanygin, M. A., Nastaushev, Y. V., Vilkov, O. Y., & Bulusheva, L. G. (2016). Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow. Applied Surface Science, 385, 464-471. https://doi.org/10.1016/j.apsusc.2016.05.120
Fedoseeva, Yu V. ; Pozdnyakov, G. A. ; Okotrub, A. V. ; Kanygin, M. A. ; Nastaushev, Yu V. ; Vilkov, O. Y. ; Bulusheva, L. G. / Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow. В: Applied Surface Science. 2016 ; Том 385. стр. 464-471.
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abstract = "Since amorphous oxygenated hydrocarbon (COxHy) films are promising engineering materials a study of the structure and composition of the films depending on the conditions of synthesis is important for controlling of their physicochemical properties. Here, we used the methods of scanning and transmission electron microscopy, X-ray photoelectron, near-edge X-ray absorption fine structure, Fourier transform infrared and Raman spectroscopy to reveal changes in the chemical connectivity of COxHy films grown on silicon substrates heated to 300, 500, and 700 °C using a supersonic flow of methane plasma. It was found that the COxHy films, deposited at 300 and 500 °C, were mainly composed of the sp2-hybridized carbon areas with various oxygen species. A rise of the substrate temperature caused an increase of the portion of tetrahedral carbon atoms as well as carboxyl and hydroxyl groups. With growth of the substrate temperature, the film thickness reduced monotonically from 400 to 180 nm, while the film adhesion improved substantially. The films, deposited at lower temperatures, showed high hydrophilicity due to porosity and presence of oxygenated groups both at the surface and in the bulk.",
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Fedoseeva, YV, Pozdnyakov, GA, Okotrub, AV, Kanygin, MA, Nastaushev, YV, Vilkov, OY & Bulusheva, LG 2016, 'Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow', Applied Surface Science, том. 385, стр. 464-471. https://doi.org/10.1016/j.apsusc.2016.05.120

Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow. / Fedoseeva, Yu V.; Pozdnyakov, G. A.; Okotrub, A. V.; Kanygin, M. A.; Nastaushev, Yu V.; Vilkov, O. Y.; Bulusheva, L. G.

В: Applied Surface Science, Том 385, 2016, стр. 464-471.

Результат исследований: Научные публикации в периодических изданияхстатья

TY - JOUR

T1 - Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow

AU - Fedoseeva, Yu V.

AU - Pozdnyakov, G. A.

AU - Okotrub, A. V.

AU - Kanygin, M. A.

AU - Nastaushev, Yu V.

AU - Vilkov, O. Y.

AU - Bulusheva, L. G.

PY - 2016

Y1 - 2016

N2 - Since amorphous oxygenated hydrocarbon (COxHy) films are promising engineering materials a study of the structure and composition of the films depending on the conditions of synthesis is important for controlling of their physicochemical properties. Here, we used the methods of scanning and transmission electron microscopy, X-ray photoelectron, near-edge X-ray absorption fine structure, Fourier transform infrared and Raman spectroscopy to reveal changes in the chemical connectivity of COxHy films grown on silicon substrates heated to 300, 500, and 700 °C using a supersonic flow of methane plasma. It was found that the COxHy films, deposited at 300 and 500 °C, were mainly composed of the sp2-hybridized carbon areas with various oxygen species. A rise of the substrate temperature caused an increase of the portion of tetrahedral carbon atoms as well as carboxyl and hydroxyl groups. With growth of the substrate temperature, the film thickness reduced monotonically from 400 to 180 nm, while the film adhesion improved substantially. The films, deposited at lower temperatures, showed high hydrophilicity due to porosity and presence of oxygenated groups both at the surface and in the bulk.

AB - Since amorphous oxygenated hydrocarbon (COxHy) films are promising engineering materials a study of the structure and composition of the films depending on the conditions of synthesis is important for controlling of their physicochemical properties. Here, we used the methods of scanning and transmission electron microscopy, X-ray photoelectron, near-edge X-ray absorption fine structure, Fourier transform infrared and Raman spectroscopy to reveal changes in the chemical connectivity of COxHy films grown on silicon substrates heated to 300, 500, and 700 °C using a supersonic flow of methane plasma. It was found that the COxHy films, deposited at 300 and 500 °C, were mainly composed of the sp2-hybridized carbon areas with various oxygen species. A rise of the substrate temperature caused an increase of the portion of tetrahedral carbon atoms as well as carboxyl and hydroxyl groups. With growth of the substrate temperature, the film thickness reduced monotonically from 400 to 180 nm, while the film adhesion improved substantially. The films, deposited at lower temperatures, showed high hydrophilicity due to porosity and presence of oxygenated groups both at the surface and in the bulk.

KW - NEXAFS

KW - Oxygenated hydrocarbon films

KW - Supersonic plasma flow deposition

KW - XPS

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VL - 385

SP - 464

EP - 471

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

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