XPS and depth resolved SXES study of HfO2/Si interlayers

E. O. Filatova, A. A. Sokolov, A. A. Ovchinnikov, S. Yu. Tveryanovich, E. P. Savinov, D. E. Marchenko, V. V. Afanas'ev, A. S. Shulakov

Research output

13 Citations (Scopus)
Original languageEnglish
Title of host publicationXPS and depth resolved SXES study of HfO2/Si interlayers
Number of pages5
DOIs
Publication statusPublished - 2010

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