UNIVERSAL CAPACITIVE SPECTROMETER FOR MEASURING THE PARAMETERS OF DEEP CENTERS IN SEMICONDUCTORS AND MOS STRUCTURES.

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Abstract

A universal capacitive spectrometer, assembled based on a bridge scheme with successive phase-sensitive detection of an hf signal (10 MHz) and a feedback system, which provides a constant capacitance regime, is described. The spectrometer permits measuring the parameters of deep centers whose relative concentration varies from 10** minus **5 up to 1 in the range of relaxation times of the signal 10** minus **4-1 sec, determined by synchronous detection of the signal, for filling pulse durations of 10 nsec to 1 msec. The spectrometer is simple to calibrate. The minimum time for clearing the feedback system equals 10 mu sec.

Original languageEnglish
Pages (from-to)696-701
Number of pages6
JournalInstruments and experimental techniques New York
Volume30
Issue number3 pt 2
StatePublished - May 1987

Scopus subject areas

  • Instrumentation

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