• V. L. Dostov
  • I. P. Ipatova
  • A. Yu Kulikov
  • Yu V. Zhyliaev

A theoretical description of chloride vapour-phase epitaxy (CVPE) has been proposed which contains two-dimensional (2D) gas-dynamic equations for transport of reactive components and kinetic equations for surface growth processes connected by nonlinear adiabatic boundary conditions. No one of these stages is supposed to be the limiting one. Calculated variations of growth rate and impurity concentrations along the growing layer fit experimental data well.

Original languageEnglish
Article number002
Pages (from-to)1935-1943
Number of pages9
JournalSemiconductor Science and Technology
Volume8
Issue number11
DOIs
StatePublished - 1 Dec 1993

    Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

ID: 39890827