Structural and Electrical Properties of AlN Layers Grown on Silicon by Reactive RF Magnetron Sputtering

N. Bazlov, N. Pilipenko, O. Vyvenko, I. Kotina, Yu. Petrov, V. Mikhailovskii, E. Ubyivovk, V. Zharinov

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

AlN films of different thicknesses were deposited on n-Si (100) substrates by reactive radio frequency (rf) magnetron sputtering. Dependences of structure and electrical properties on thickness of deposited films were researched. The structures of the films were analyzed with scanning electron microscopy (SEM) and with transmitting electron microscopy (TEM). Electrical properties of the films were investigated on Au-AlN-(n-Si) structures by means of current-voltage (I-V), capacitance-voltage (C-V) and deep level transient spectroscopy (DLTS) techniques. Electron microscopy investigations had shown that structure and chemical composition of the films were thickness stratified. Near silicon surface layer was amorphous aluminum oxide one contained traps of positive charges with concentration of about 4 x 10(18) cm(-3). Upper layers were nanocrystalline ones consisted of both wurzite AlN and cubic AlON nanocrystals. They contained traps both positive and negative charges which were situated within 30 nm distance
Original languageEnglish
Title of host publicationStructural and Electrical Properties of AlN Layers Grown on Silicon by Reactive RF Magnetron Sputtering
PublisherAmerican Institute of Physics
Number of pages9
ISBN (Print)9780735414051
DOIs
StatePublished - 2016
Event5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects - Saint Petersburg, Russian Federation
Duration: 26 Apr 201629 Apr 2016
Conference number: 5
http://www.globaleventslist.elsevier.com/events/2016/04/strann-2016-state-of-the-art-trends-of-scientific-research-of-artificial-and-natural-nanoobjects/
http://eibl.spbu.ru/strann-2016/

Conference

Conference5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects
Abbreviated titleSTRANN 2016
CountryRussian Federation
CitySaint Petersburg
Period26/04/1629/04/16
Internet address

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