SPECIAL ASPECTS OF DIELECTRIC SAMPLES SPUTTERING IN PULSED (DC) GD MS

Victoria Bodnar, Anna Gubal, Aleksandr Ganeev, Nikolay Solovyev, Oleg Glumov, Yegor Lyalkin, Viktor Yacobson

Research output: Contribution to conferenceAbstract

Original languageEnglish
StatePublished - Apr 2018
Event4th International Glow Discharge Spectroscopy Symposium - BAM, Berlin, Germany
Duration: 15 Apr 201818 Apr 2018

Conference

Conference4th International Glow Discharge Spectroscopy Symposium
CountryGermany
CityBerlin
Period15/04/1818/04/18

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