The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.
|Title of host publication||Helium Ion Microscopy|
|Editors||Gregor Hlawacek, Armin Gölzhäuser|
|State||Published - 2016|
|Name||NanoScience and Technology|