Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging

Research output: Chapter in Book/Report/Conference proceedingChapterResearchpeer-review

8 Scopus citations

Abstract

The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.
Original languageEnglish
Title of host publicationHelium Ion Microscopy
EditorsGregor Hlawacek, Armin Gölzhäuser
PublisherSpringer Nature
Pages119-146
ISBN (Electronic)978-3-319-41990-9
ISBN (Print)978-3-319-41988-6
DOIs
StatePublished - 2016

Publication series

Name NanoScience and Technology

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