Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging

Research output

4 Citations (Scopus)

Abstract

The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.
Original languageEnglish
Title of host publicationHelium Ion Microscopy
EditorsGregor Hlawacek, Armin Gölzhäuser
PublisherSpringer
Pages119-146
ISBN (Electronic)978-3-319-41990-9
ISBN (Print)978-3-319-41988-6
DOIs
Publication statusPublished - 2016

Publication series

Name NanoScience and Technology

Fingerprint

ion microscopes
helium ions
microscopy
electrons
ions
electron energy
scanning

Cite this

Petrov, Y. V., & Vyvenko, O. F. (2016). Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. In G. Hlawacek, & A. Gölzhäuser (Eds.), Helium Ion Microscopy (pp. 119-146). ( NanoScience and Technology). Springer. https://doi.org/10.1007/978-3-319-41990-9_5
Petrov, Yuri V. ; Vyvenko, Oleg F. / Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. Helium Ion Microscopy. editor / Gregor Hlawacek ; Armin Gölzhäuser. Springer, 2016. pp. 119-146 ( NanoScience and Technology).
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Petrov, YV & Vyvenko, OF 2016, Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. in G Hlawacek & A Gölzhäuser (eds), Helium Ion Microscopy. NanoScience and Technology, Springer, pp. 119-146. https://doi.org/10.1007/978-3-319-41990-9_5

Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. / Petrov, Yuri V.; Vyvenko, Oleg F.

Helium Ion Microscopy. ed. / Gregor Hlawacek; Armin Gölzhäuser. Springer, 2016. p. 119-146 ( NanoScience and Technology).

Research output

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AB - The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.

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Petrov YV, Vyvenko OF. Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. In Hlawacek G, Gölzhäuser A, editors, Helium Ion Microscopy. Springer. 2016. p. 119-146. ( NanoScience and Technology). https://doi.org/10.1007/978-3-319-41990-9_5