Secondary electron energy distribution from insulators in helium ion microscope

A. E. Anikeva, Yu V. Petrov, O. F. Vyvenko

Research output

Abstract

Secondary electron emission generated by the impact of positive ions from insulators is generally strongly retarded due unavoidable positive charging of the target hindering the reliable characterization of the materials. Special measurement procedure utilizing a distant single-ion impact is developed and the experimental conditions to avoid the charging are found. The data on secondary electron energy distribution (SEED) in the helium ion microscope for platinum, silicon nitride, and silicon dioxide are presented. It is shown that with the help of the suggested procedure SEED can be determined for any material with a high accuracy.

Original languageEnglish
Title of host publicationState-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018
EditorsYuri Petrov, Oleg Vyvenko
PublisherAmerican Institute of Physics
Number of pages8
Volume2064
ISBN (Electronic)9780735417922
ISBN (Print)9780735417922
DOIs
Publication statusPublished - 15 Jan 2019
EventInternational Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018 - Moscow
Duration: 17 Oct 201819 Oct 2018

Publication series

NameAIP Conference Proceedings
PublisherAMER INST PHYSICS
Volume2064
ISSN (Print)0094-243X

Conference

ConferenceInternational Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018
CountryRussian Federation
CityMoscow
Period17/10/1819/10/18

Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Anikeva, A. E., Petrov, Y. V., & Vyvenko, O. F. (2019). Secondary electron energy distribution from insulators in helium ion microscope. In Y. Petrov, & O. Vyvenko (Eds.), State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018 (Vol. 2064). [020001] (AIP Conference Proceedings; Vol. 2064). American Institute of Physics. https://doi.org/10.1063/1.5087657