Scaling laws for oxygen plasmas

E. A. Bogdanov, V. I. Kolobov, A. A. Kudryavtsev, L. D. Tsendin

Research output

Abstract

Scaling laws enable one to simply estimate and predict plasma characteristics based of external discharge parameters. The presence of negative ions drastically changes the transport processes that define the spatial distributions of plasma components and other properties of the plasma. Thus, the scaling laws can be derived using a global model of a plasma reactor that assumes certain spatial distributions of charged species.

Original languageEnglish
Article number106
Number of pages1
JournalIEEE International Conference on Plasma Science
DOIs
Publication statusPublished - 1 Jan 2002

Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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