The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.
|Journal||Journal of Physics: Conference Series|
|State||Published - 29 Oct 2019|
|Event||10th Republican Scientific Technical Conference on Low-Temperature Plasma During the Deposition of Functional Coatings - Kazan, Russian Federation|
Duration: 5 Nov 2018 → 8 Nov 2018
Scopus subject areas
- Physics and Astronomy(all)