Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method

Research output: Contribution to journalConference articlepeer-review

Abstract

The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.

Original languageEnglish
Article number012073
JournalJournal of Physics: Conference Series
Volume1328
Issue number1
DOIs
StatePublished - 29 Oct 2019
Event10th Republican Scientific Technical Conference on Low-Temperature Plasma During the Deposition of Functional Coatings - Kazan, Russian Federation
Duration: 5 Nov 20188 Nov 2018

Scopus subject areas

  • Physics and Astronomy(all)

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