Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors: III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems

T. N. Sevast'yanova, A. Yu Timoshkin, E. I. Davydova, O. V. Dubov, A. V. Suvorov, Henry F. Schaefer

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4 Citations (Scopus)

Abstract

Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.

Original languageEnglish
Pages (from-to)48-53
Number of pages6
JournalRussian Journal of General Chemistry
Volume73
Issue number1
DOIs
Publication statusPublished - 1 Jan 2003

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Scopus subject areas

  • Chemistry(all)

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