Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

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Original languageEnglish
Title of host publication8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019)
Subtitle of host publicationBook of Abstracts
PagesOC-06
Number of pages1
StatePublished - 2019
Event8th International Conference on Hard X-ray Photoelectron Spectroscopy - Paris, France
Duration: 2 Jun 20197 Jun 2019

Conference

Conference8th International Conference on Hard X-ray Photoelectron Spectroscopy
Abbreviated titleHAXPES 2019
Country/TerritoryFrance
CityParis
Period2/06/197/06/19

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