Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

E.  Filatova; A.  Konashuk; S.  Sakhonenkov

Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

E. Filatova, A. Konashuk, S. Sakhonenkov

Department of Solid State Electronics

Research output: Chapter in Book/Report/Conference proceeding › Other chapter contribution › Research › peer-review

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Original language	English
Title of host publication	8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019)
Subtitle of host publication	Book of Abstracts
Pages	OC-06
Number of pages	1
State	Published - 2019
Event	8th International Conference on Hard X-ray Photoelectron Spectroscopy - Paris, France Duration: 2 Jun 2019 → 7 Jun 2019

Conference

Conference	8th International Conference on Hard X-ray Photoelectron Spectroscopy
Abbreviated title	HAXPES 2019
Country/Territory	France
City	Paris
Period	2/06/19 → 7/06/19

Access to Document

P_1_ from HAXPES-2019-Book of AbstractsFinal published version, 1.33 MB
P_7_ from HAXPES-2019-Book of AbstractsFinal published version, 231 KBLicense: Unspecified
Pages from HAXPES-2019-Book of AbstractsFinal published version, 513 KB

Cite this

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title = "Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer",

author = "E. Filatova and A. Konashuk and S. Sakhonenkov",

year = "2019",

language = "English",

pages = "OC--06",

booktitle = "8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019)",

note = "8th International Conference on Hard X-ray Photoelectron Spectroscopy , HAXPES 2019 ; Conference date: 02-06-2019 Through 07-06-2019",

}

Filatova, E , Konashuk, A & Sakhonenkov , S 2019, Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer. in 8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019): Book of Abstracts. pp. OC-06, 8th International Conference on Hard X-ray Photoelectron Spectroscopy , Paris, France, 2/06/19.

Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer. / Filatova, E. ; Konashuk, A. ; Sakhonenkov , S. .

8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019): Book of Abstracts. 2019. p. OC-06.

Research output: Chapter in Book/Report/Conference proceeding › Other chapter contribution › Research › peer-review

TY - CHAP

T1 - Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

AU - Filatova, E.

AU - Konashuk, A.

AU - Sakhonenkov , S.

PY - 2019

Y1 - 2019

M3 - Other chapter contribution

SP - OC-06

BT - 8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019)

T2 - 8th International Conference on Hard X-ray Photoelectron Spectroscopy

Y2 - 2 June 2019 through 7 June 2019

ER -