Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

Елена Олеговна Филатова, Алексей Сергеевич Конашук, Сергей Сергеевич Сахоненков

Research output

19 Downloads (Pure)
Original languageEnglish
PagesOC-06
Number of pages1
Publication statusPublished - 2019

Cite this

Филатова, Елена Олеговна ; Конашук, Алексей Сергеевич ; Сахоненков, Сергей Сергеевич. / Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer. 1 p.
@conference{1a4893a84e2e4a5993ded3c291f1c0f8,
title = "Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer",
author = "Филатова, {Елена Олеговна} and Конашук, {Алексей Сергеевич} and Сахоненков, {Сергей Сергеевич}",
year = "2019",
language = "English",
pages = "OC--06",

}

Филатова, ЕО, Конашук, АС & Сахоненков, СС 2019, 'Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer' pp. OC-06.

Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer. / Филатова, Елена Олеговна; Конашук, Алексей Сергеевич; Сахоненков, Сергей Сергеевич.

2019. OC-06.

Research output

TY - CONF

T1 - Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

AU - Филатова, Елена Олеговна

AU - Конашук, Алексей Сергеевич

AU - Сахоненков, Сергей Сергеевич

PY - 2019

Y1 - 2019

M3 - Abstract

SP - OC-06

ER -

Филатова ЕО, Конашук АС, Сахоненков СС. Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer. 2019.

Access to Document