Non-silicon MEMS platforms for gas sensors

A. A. Vasiliev, A. V. Pisliakov, A. V. Sokolov, N. N. Samotaev, S. A. Soloviev, K. Oblov, V. Guarnieri, L. Lorenzelli, J. Brunelli, A. Maglione, A. S. Lipilin, A. Mozalev, A. V. Legin

Research output

45 Citations (Scopus)

Abstract

The target of this work is the demonstration of advanced approaches able to provide non-silicon MEMS platforms for chemical sensor operating under harsh environmental conditions and, on the other hand, to assure microhotplate stable at high temperature, which can be used for the deposition of refractory gassensing materials, for example, oxides of gallium, zirconium, or hafnium. Non-silicon materials that can be used for these MEMS platforms include aluminum oxide, yttria-stabilized zirconia and thin boro silicate glass. It was shown that thin ceramic films made of oxide materials can withstand annealing temperature up to 1000 degrees C, MEMS sensor based on these films consumes
Original languageEnglish
Number of pages14
JournalSensors and Actuators, B: Chemical
Volume224
DOIs
Publication statusPublished - 2016

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    Vasiliev, A. A., Pisliakov, A. V., Sokolov, A. V., Samotaev, N. N., Soloviev, S. A., Oblov, K., Guarnieri, V., Lorenzelli, L., Brunelli, J., Maglione, A., Lipilin, A. S., Mozalev, A., & Legin, A. V. (2016). Non-silicon MEMS platforms for gas sensors. Sensors and Actuators, B: Chemical, 224. https://doi.org/10.1016/j.snb.2015.10.066