Membrane-Capacitive transducer with compensation for the Primary Standard of Pressure

I.V. Andronov, V.N. Gorobey, E.K. Izrailov, R.E. Kuvandykov, A.A. Lobashev, A.A. Chernyshenko

Research output

Abstract

The paper discusses improvements for the primary vacuum-meter transducer for measuring absolute pressure in a wide range from 0.1 to 10 Pa.

Original languageEnglish
Article number012002
Number of pages5
JournalIOP Conference Series: Materials Science and Engineering
Volume387
Issue number1
DOIs
Publication statusPublished - 17 Jul 2018
Event25th International Conference on Vacuum Technique and Technology - Saint Petersburg Electrotechnical University "LETI", St. Petersburg
Duration: 5 Jun 20187 Jun 2018
Conference number: 138441

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Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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