Mathematical simulation of a membrane capacitive compensation pressure transducer

A. I. Eikhval’d, I. V. Sadkovskaya, T. A. Eikhval’d

Research output

Abstract

The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25–29% of the measured value, which makes them inappropriate for use in pressure metrology.

Original languageEnglish
Pages (from-to)769-771
Number of pages3
JournalTechnical Physics Letters
Volume42
Issue number8
DOIs
Publication statusPublished - 1 Aug 2016

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Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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