Matched characterization of super-multiperiod superlattices

Leonid Goray, Evgeniy Pirogov, Maxim Sobolev, Igor Ilkiv, Alexander Dashkov, Ekaterina Nikitina, Evgenii Ubyivovk, Leonid Gerchikov, Andrei Ipatov, Yuliy Vainer, Mikhail Svechnikov, Pavel Yunin, Nikolay Chkhalo, Alexei Bouravlev

Research output


Heterostructures with multiple strongly coupled quantum wells, such as super-multiperiod (SMP) superlattices (SLs), are promising semiconductor devices, which may contain hundreds or even thousands of layers with 100 or more periods synthesized by molecular beam epitaxy (MBE) to high structural perfection. The proposed characterization method employs matched application of high-resolution x-ray diffractometry (XRD), reflectometry (XRR), and, for the first time, the deep XRR (DXRR) allows the study of SMP structures, as well as high-accuracy determination of the thicknesses of layers, roughness/diffuseness of boundaries using the rigorous scattering theory, and composition of solid solutions. Combining these methods with scanning transmission electron microscopy (STEM) enables characterization of SMP SLs and independent determination of these same parameters. The differences between the expected and obtained layer thicknesses by XRD and XRR were 1%-3% for AlGaAs/GaAs structures. The samples were characterized by sharp interfaces with the root-mean-square width of the transition layers of the order of a few angstrom, which is consistent with the XRR/DXRR and STEM analysis. Based on the data obtained for the thicknesses of layers, the composition of Al0.3Ga0.7As has been accurately determined by the x-ray methods. These results may be considered as the first step in the analysis of MBE-grown SMP structures with a number of periods up to 1000.

Original languageEnglish
Article number455103
Number of pages9
JournalJournal of Physics D: Applied Physics
Issue number45
Publication statusPublished - 4 Nov 2020

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