Main scenarios of spatial distribution of charged and neutral components in SF6 plasma

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Abstract

Numerical modeling and theoretical analyses of spatial distribution with detailed set of plasmachemical processes in elegas have been made for a wide range of pressures. Evolution of main charged and neutral particles in time and space has been obtained. It is shown that at low pressures, the Boltzmann distribution holds for both electrons and negative ions and separation of the plasma into two regions with an almost flat profile of the electron density. At high pressures, electronegativity of plasma is extremely high and the self-consistent electric field is determined not only by the electrons, as in the conventional plasma, but also by the ions of both signs. This leads to an abnormally small potential drop in the plasma and nonmonotonic ion profiles.
Original languageEnglish
Pages (from-to)3254-3267
JournalIEEE Transactions on Plasma Science
Volume41
Issue number12
DOIs
Publication statusPublished - 2013

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