Magnification of interferogram with the use of digital holography

V. Ivanov, S. Pul'Kin, A. Sevryugin, V. Venediktov

Research output

Abstract

The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases. © 2014 IEEE.
Original languageEnglish
Title of host publicationProceedings - 2014 International Conference Laser Optics, LO 2014
DOIs
Publication statusPublished - 2014

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