Kinetics of Hydrogen Motion via Dislocation Network in Hydrophilically Direct Bonded Silicon Wafers

A. Loshachenko, O. Vyvenko, O. Kononchuk

Research output

2 Citations (Scopus)
Original languageEnglish
Title of host publicationKinetics of Hydrogen Motion via Dislocation Network in Hydrophilically Direct Bonded Silicon Wafers
Pages341-345
DOIs
Publication statusPublished - 2014

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