Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds

Research output

Original language	English
Number of pages	10
Journal	Physical Chemistry Chemical Physics
DOIs	https://doi.org/10.1039/D0CP05180B
Publication status	Published - 2020

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@article{1404bea422194d85a201aef0f79508a4,

title = "Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds",

author = "Филатова, {Елена Олеговна} and Сахоненков, {Сергей Сергеевич} and Гайсин, {Айдар Уралович} and Конашук, {Алексей Сергеевич}",

year = "2020",

doi = "10.1039/D0CP05180B",

language = "English",

journal = "Physical Chemistry Chemical Physics",

issn = "1463-9076",

publisher = "Royal Society of Chemistry",

}

Research output

TY - JOUR

T1 - Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds

AU - Филатова, Елена Олеговна

AU - Сахоненков, Сергей Сергеевич

AU - Гайсин, Айдар Уралович

AU - Конашук, Алексей Сергеевич

PY - 2020

Y1 - 2020

U2 - 10.1039/D0CP05180B

DO - 10.1039/D0CP05180B

M3 - Article

JO - Physical Chemistry Chemical Physics

JF - Physical Chemistry Chemical Physics

SN - 1463-9076

ER -