Precise individual addressing of single atoms in quantum registers formed by optical trap arrays is essential
to achieve high-fidelity quantum gates in neutral-atom quantum computers and simulators. Two-qubit quantum
gates are typically implemented using coherent two-photon laser excitation of atoms to strongly interacting
Rydberg states. However, two-photon excitation encounters challenges in individual addressing with tightly
focused laser beams due to atom position uncertainty and the spatial inhomogeneity in both Rabi frequencies and
light shifts. In this work, we theoretically demonstrate that the fidelity of individual addressing is significantly
enhanced by employing coherent three-photon laser excitation of Rydberg states. For a specific example of
1 2 3 → 5p3/2 −→ 7s1/2 −
→ np excitation in 87 Rb atoms, we find that upon strong laser coupling in the second 5s1/2 − step (Rabi frequency 2 ) and moderate coupling in the first and third steps (Rabi frequencies 1 and 3 ), the three-photon Rabi frequency is given by = 1 3 /2 . If the spatial distributions of (1 3 ) and 2 are
arranged to be identical, becomes independent of atom position, even within very tightly focused laser beams.
This approach dramatically improves individual addressing of Rydberg excitation for neighboring atoms in trap
arrays compared to conventional two-photon excitation schemes. Our findings are crucial for large-scale quantum
registers of neutral atoms, where distances between adjacent atoms should be minimized to ensure stronger
Rydberg interactions and compact arrangement of atom arrays.