Halide Vapor Phase Epitaxy α- and ε-Ga2O3 Epitaxial Films Grown on Patterned Sapphire Substrates

Sevastian Shapenkov, Oleg Vyvenko, Evgeny Ubyivovk, Oleg Medvedev, Georgiy Varygin, Andrey Chikiryaka, Alexei Pechnikov, Mikhail Scheglov, Sergei Stepanov, Vladimir Nikolaev

Research output

11 Citations (Scopus)


The growth of Ga2O3 films by halide vapor phase epitaxy on plain and cone-shaped patterned sapphire substrates (PSS) is reported. The obtained specimens are characterized by X-ray diffraction, transmission electron microscopy, cathodoluminescence, optical transmission spectroscopy, and current–voltage measurements. Both types of Ga2O3 layers are of reasonably high crystal qualities; their physical properties, however, are very different. Under the same conditions, the growth on plain substrates results in a continuous α-Ga2O3 layer, whereas the growth on PSS produces a regular array of α-Ga2O3 columns on top of the sapphire cones with the space between them filled with ε-Ga2O3. Ga2O3 films grown on plain sapphire are insulating; in contrast, Ga2O3 films grown on PSS are conducting. It is found that the conductivity of Ga2O3 on PSS follows the Arrhenius law with the activation energy of 0.33 eV. New luminescent bands for α- and ε-phases are found. Spectral components of the defect-related luminescence for α- and ε- phases are identified.

Original languageEnglish
Article number1900892
Number of pages6
JournalPhysica Status Solidi (A) Applications and Materials Science
Issue number14
Early online date14 Feb 2020
Publication statusPublished - Jul 2020

Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Surfaces and Interfaces

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