Genesis of ZnO nanolayers grown by ALD in micro channel plates

Adil Yafyasov, Arseniy Drozd, Victor Drozd, Sergey Kesaev

Research outputpeer-review

Abstract

In this work we investigated the possibility of applying the method of Atomic Layer Deposition to obtain thin films of zinc oxide deposited in narrow channels of micro channel plate. Calculations were carried out to find the optimum conditions for the synthesis. The resulting films have good continuity and uniformity. The electrical conductivity was studied on zinc oxide in the initial stages of growth on structures which we prepared.

Original languageEnglish
Title of host publication2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings
EditorsNikolay V. Egorov, Konstantin A. Nikiforov, Victor E. Drozd
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages31-32
Number of pages2
ISBN (Electronic)9781509034161
DOIs
Publication statusPublished - 24 Mar 2017
Event14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - St. Petersburg
Duration: 1 Oct 20163 Oct 2016

Publication series

Name2016 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - Proceedings

Conference

Conference14th International Baltic Conference on Atomic Layer Deposition, BALD 2016
CountryRussian Federation
CitySt. Petersburg
Period1/10/163/10/16

Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Surfaces and Interfaces
  • Process Chemistry and Technology
  • Electrochemistry

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