Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation

Alexander Kukaev, Dmitry Lukyanov, Denis Mikhailenko, Daniil Safronov, Sergey Shevchenko, Vladimir Venediktov, Andrey Vlasov

Research output: Contribution to journalArticlepeer-review

Abstract

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

Original languageEnglish
Article number10
Pages (from-to)1-10
Number of pages10
JournalMicromachines
Volume12
Issue number1
DOIs
StatePublished - Jan 2021

Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Keywords

  • Delay line
  • Laser
  • Solid-state microgyroscope
  • Surface acoustic wave
  • Topology

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