Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films

E.O. Filatova, I.V. Kozhevnikov, A.A. Sokolov, A.S. Konashuk, F. Schaefers, M. Popovici, V.V. Afanas'Ev

Research output: Contribution to journal › Article

4 Scopus citations

Original language	English
Pages (from-to)	110-116
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	196
DOIs	https://doi.org/10.1016/j.elspec.2014.01.021
State	Published - 2014

Access to Document

@article{a337f52bb91f49779098b8c548ee880f,

title = "Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films",

author = "E.O. Filatova and I.V. Kozhevnikov and A.A. Sokolov and A.S. Konashuk and F. Schaefers and M. Popovici and V.V. Afanas'Ev",

year = "2014",

doi = "10.1016/j.elspec.2014.01.021",

language = "English",

volume = "196",

pages = "110--116",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article

TY - JOUR

T1 - Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films

AU - Filatova, E.O.

AU - Kozhevnikov, I.V.

AU - Sokolov, A.A.

AU - Konashuk, A.S.

AU - Schaefers, F.

AU - Popovici, M.

AU - Afanas'Ev, V.V.

PY - 2014

Y1 - 2014

U2 - 10.1016/j.elspec.2014.01.021

DO - 10.1016/j.elspec.2014.01.021

M3 - Article

VL - 196

SP - 110

EP - 116

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

SN - 0368-2048

ER -