Additive technologies for ceramic MEMS sensors

A. A. Vasiliev, A. V. Sokolov, A. V. Legin, N. N. Samotaev, K. Yu Oblov, V. P. Kim, S. V. Tkachev, S. P. Gubin, G. N. Potapov, Yu V. Kokhtina, A. V. Nisan

Research output

6 Citations (Scopus)

Abstract

The application of MEMS technology for the fabrication of MOX sensors with low power consumption becomes now a very important trend in gas sensor design. However, traditional silicon technology has some evident disadvantages, when applied in high-temperature devices produced in limited batch. We present our attempt to combine the advantages of ceramic MEMS technology (high working (600°C) and technological treatment (1000°C) temperature, chemical stability at high temperature) with the advantages of additive technologies for the fabrication of functional elements of gas sensor (heaters, sensing, and catalytic layers). We developed conductive silver, gold and platinum nanoparticle (10-30 nm) inks usable in ink and aerosol jet printers and demonstrated the possibility to fabricate narrow conductive lines of microheaters and electrodes of sensor (line width ∼ 35 μm). The combination of jet printing onto thin ceramic substrate with laser cutting enables the fabrication of advanced cantilever type sensors operating in pulsing heating mode.

Original languageEnglish
Pages (from-to)1087-1090
Number of pages4
JournalProcedia Engineering
Volume120
DOIs
Publication statusPublished - 1 Jan 2015
Event29th European Conference on Solid-State Transducers, EUROSENSORS 2015; Freiburg; Germany; 6 September 2015 through 9 September 2015. - Freiburg
Duration: 6 Sep 20159 Sep 2015

Scopus subject areas

  • Engineering(all)

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