Елена Олеговна Филатова - Activities › SPbU Researchers Portal

Елена Олеговна Филатова

Елена Олеговна Филатова

Filatova, Elena

профессор, главный научный сотрудник, старший научный сотрудник

Department of Solid State Electronics

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Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer
Елена Олеговна Филатова (Keynote speaker), Алексей Сергеевич Конашук (Speaker) & Сергей Сергеевич Сахоненков (Speaker)
2019
Activity: Conference talk types › Invited talk

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ID: 173981