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Research Output 2015 2015

  • 1 Conference article
4 Citations (Scopus)

Additive technologies for ceramic MEMS sensors

Vasiliev, A. A., Sokolov, A. V., Legin, A. V., Samotaev, N. N., Oblov, K. Y., Kim, V. P., Tkachev, S. V., Gubin, S. P., Potapov, G. N., Kokhtina, Y. V. & Nisan, A. V., 1 Jan 2015, In : Procedia Engineering. 120, p. 1087-1090 4 p.

Research output: Contribution to journalConference articleResearchpeer-review